24 March 1982 Short Wavelength Interferometric Testing Of X-Ray Optics
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Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933120
Event: 1981 Brookhaven Conferences, 1981, Upton, United States
Abstract
Previous work has demonstrated the use of the LINNIK Point Diffraction Interferometer for the measurement of wavefront error in soft x-ray imaging systems. Operational wave-lengths from 632.8nm (He-Ne) down to 313.1nm (Hg) have been used. This paper describes our extension of the technique to 253.7nm together with a demonstration. of feasibility at 121.6 nm (Hydrogen. Lyman-α), we believe for the first time. Finally the possibility of working at soft X-Ray wavelengths is considered.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Mrowka, S. Mrowka, W. Harris, W. Harris, R. J. Speer, R. J. Speer, } "Short Wavelength Interferometric Testing Of X-Ray Optics", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933120; https://doi.org/10.1117/12.933120
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