24 March 1982 Status Of The Scanning X-Ray Microscope
Author Affiliations +
Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933142
Event: 1981 Brookhaven Conferences, 1981, Upton, United States
Some details of the scanning X-ray microscope are described. The system is under con-struction for a resolution of 10 to 50 nm.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Niemann, B. Niemann, G. Schmahl, G. Schmahl, D. Rudolph, D. Rudolph, } "Status Of The Scanning X-Ray Microscope", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); doi: 10.1117/12.933142; https://doi.org/10.1117/12.933142

Back to Top