Refractory Metal Interconnects For VHSIC

Lynette B. Roth; Gunter Hagen

doi:10.1117/12.933159

4 August 1982 Refractory Metal Interconnects For VHSIC

Lynette B. Roth, Gunter Hagen

Proceedings Volume 0319, Very High Speed Integrated Circuit Technology for Electro-Optic Applications; (1982) https://doi.org/10.1117/12.933159
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

The increasing stringency of the speed, power, and density requirements of signal processors for military systems over the past decade has contributed to a rapid reduction of the typical feature size of IC components and to the development of high-performance technologies such as CMOS/SOS and I²L. The continued evolution of semiconductor technologies to even smaller feature sizes and improved performance characteristics indicates the need to reorganize the chip architecture into cells and to provide a two-level interconnect scheme.(1-7) Specifically the first level of interconnect would be used for low-energy communication within a cell and the second level would route power around the chip and provide communication between cells. Further advantages can be gained if the first level metal is a low resistivity refractory material.(1-7)

Citation Download Citation

Lynette B. Roth and Gunter Hagen "Refractory Metal Interconnects For VHSIC", Proc. SPIE 0319, Very High Speed Integrated Circuit Technology for Electro-Optic Applications, (4 August 1982); https://doi.org/10.1117/12.933159

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available