27 August 1982 Integrated Optical Circuits Fabricated With Laser-Written Masks
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Proceedings Volume 0321, Integrated Optics II; (1982) https://doi.org/10.1117/12.933215
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States
Abstract
Integrated optical circuits have been fabricated using laser-written masks. Straight and curved channel waveguides have been made by ion exchange from a KNO3 melt of dimensions 10 to 30 pm in width and typically 4 to 5 cm in length. A mask made by a multiple exposure technique from a laser-written curved channel mask has been used to delineate a directional coupler in LiNbO3.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. E. Wilson, C. T. Mueller, E. Garmire, "Integrated Optical Circuits Fabricated With Laser-Written Masks", Proc. SPIE 0321, Integrated Optics II, (27 August 1982); doi: 10.1117/12.933215; https://doi.org/10.1117/12.933215
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