Organometallic Vapor Phase Epitaxy (OMVPE) Growth Of Al[sub]x[/sub]Ga[sub]1-x[/sub]As

Gerald B. Stringfellow

doi:10.1117/12.934278

15 September 1982 Organometallic Vapor Phase Epitaxy (OMVPE) Growth Of Al_xGa_1-xAs

Gerald B. Stringfellow

Proceedings Volume 0323, Semiconductor Growth Technology; (1982) https://doi.org/10.1117/12.934278
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

The OMVPE growth technique has only recently been established to yield device quality III-V compounds and alloys. The alloy receiving the most attention has been AlxGa1-xAs because of its application to lattice matched heterostructure devices such as solar cells and lasers, including multiquantum-well structures. This paper briefly reviews the development of OMVPE for the growth of AlxGa1-xAs, including a discussion of problems which were solved to reach the current state-of-the-art. The fundamental aspects of OMVPE growth are discussed, especially emphasizing fundamental advantages and disadvantages of OMVPE relative to other growth techniques such as LPE, MBE, and halide VPE. Other less fundamental aspects of OMVPE relating to purity, uniformity, surface morphology, and flexibility are also discussed. The current status of OMVPE AlxGa1-xAs material and devices is summarized.

Citation Download Citation

Gerald B. Stringfellow "Organometallic Vapor Phase Epitaxy (OMVPE) Growth Of Al_xGa_1-xAs", Proc. SPIE 0323, Semiconductor Growth Technology, (15 September 1982); https://doi.org/10.1117/12.934278

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available