Comparison Of Autoalign Techniques

Bruce Heflinger

doi:10.1117/12.933562

13 September 1982 Comparison Of Autoalign Techniques

Bruce Heflinger

Proceedings Volume 0334, Optical Microlithography I: Technology for the Mid-1980s; (1982) https://doi.org/10.1117/12.933562
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

Design criteria for wafer stepper alignment systems are discussed. Several examples are presented. A glossary of terms is included.

Citation Download Citation

Bruce Heflinger "Comparison Of Autoalign Techniques", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); https://doi.org/10.1117/12.933562

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