13 September 1982 Comparison Of Autoalign Techniques
Author Affiliations +
Abstract
Design criteria for wafer stepper alignment systems are discussed. Several examples are presented. A glossary of terms is included.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bruce Heflinger, Bruce Heflinger, } "Comparison Of Autoalign Techniques", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); doi: 10.1117/12.933562; https://doi.org/10.1117/12.933562
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT


Back to Top