13 September 1982 Philips Wafer Stepper: Characterization And Processing Experience
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Abstract
The operation of the Philips Wafer stepper and the automated measurement techniques used to characterize it are reviewed. Characterization data in terms of registration accuracy, lens performance and throughput are presented. Finally, our processing experience with this stepper is described.
© (1982) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roel Kramer, Roel Kramer, Rene Vervoordeldonk, Rene Vervoordeldonk, Stefan Wittekoek, Stefan Wittekoek, Rene Beem, Rene Beem, Guido van der Looij, Guido van der Looij, } "Philips Wafer Stepper: Characterization And Processing Experience", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); doi: 10.1117/12.933565; https://doi.org/10.1117/12.933565
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