23 May 1983 Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing
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Abstract
In this paper, we propose the use of an incoherent optical image subtraction technique for automatic micro-circuit board inspection. We believe that this proposed technique would have profound effect on automatic inspection scheme in the application of faulty detection and identification of micro-circuitries. The technique would provide the capability of rapid identification, inspection, and possibly utilizing for synthesis and fabrication. Experimental simulation of the IC chip inspection is provided.
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F. T.S. Yu, F. T.S. Yu, S. L. Zhuang, S. L. Zhuang, N. H. Wang, N. H. Wang, } "Integrated Circuit (IC) Chip Inspection With Incoherent Optical Processing", Proc. SPIE 0360, Robotics and Industrial Inspection, (23 May 1983); doi: 10.1117/12.934116; https://doi.org/10.1117/12.934116
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