Description And Limitations Of An Automated Scatterometer

William L. Wolfe; Frederick O. Bartell; Lawrence D. Brooks

doi:10.1117/12.934149

5 April 1983 Description And Limitations Of An Automated Scatterometer

William L. Wolfe, Frederick O. Bartell, Lawrence D. Brooks

Proceedings Volume 0362, Scattering in Optical Materials II; (1983) https://doi.org/10.1117/12.934149
Event: 26th Annual Technical Symposium, 1982, San Diego, United States

Abstract

The methods, capabilities and limitations of a multiwavelength scatterometer are described.

Citation Download Citation

William L. Wolfe, Frederick O. Bartell, and Lawrence D. Brooks "Description And Limitations Of An Automated Scatterometer", Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); https://doi.org/10.1117/12.934149

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