5 April 1983 Instrumentation Of A Variable Angle Scatterometer (VAS)
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Proceedings Volume 0362, Scattering in Optical Materials II; (1983); doi: 10.1117/12.934147
Event: 26th Annual Technical Symposium, 1982, San Diego, United States
Abstract
The problem of light scatter from optical surfaces is amplified to a critical level for the optics used in the Ring Laser Gyro (RLG). This has led to the development of a scatterometer at the RLG Lab, Wright-Patterson AFB, which can detect low level light scatter from the high quality optics used in RLG's, without first overcoating with metals. A helium-neon laser is used to illuminate a 0.5 mm diameter spot on the surface of the test part. The incident angle can be varied from 0 to 90 degrees, and the test piece can be maneuvered with five degrees of freedom, four of which are computer controlled. Scatter measurements are made with a photomultiplier detection system which can easily measure down to 10 parts per billion per steradian. The computer can analyze and plot the results very quickly and accurately for further interpretation.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fred D. Orazio, W. Kent Stowell, Robert M. Silva, "Instrumentation Of A Variable Angle Scatterometer (VAS)", Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); doi: 10.1117/12.934147; https://doi.org/10.1117/12.934147
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KEYWORDS
Photometry

Bidirectional reflectance transmission function

Scatter measurement

Mirrors

Light scattering

Calibration

Optical testing

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