Applications Of Acoustic Microscopy In The Semiconductor Industry

A. J. Miller

doi:10.1117/12.934326

29 March 1983 Applications Of Acoustic Microscopy In The Semiconductor Industry

A. J. Miller

Proceedings Volume 0368, Microscopy: Techniques and Capabilities; (1983) https://doi.org/10.1117/12.934326
Event: Microscopy-Techniques and Capabilities, 1982, London, United Kingdom

Abstract

The Quate scanning acoustic microscope has now become established in university research groups, and interest is being shown from industry. The author has constructed a 1 GHz reflection instrument with lateral resolution better than 2 μm, and has been evaluating a number of possible applications. Some of these are discussed in detail and will include: (i) The examination of integrated circuit chips processed in MOS technologies, using the subsurface capability of the instrument. (ii) Metallurgical studies (iii) Thin-film studies, including organic thin films Emphasis will be placed on the merits of acoustic microscopy as opposed to other methods, and further developments of the technique likely to be of use will be discussed.

Citation Download Citation

A. J. Miller "Applications Of Acoustic Microscopy In The Semiconductor Industry", Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); https://doi.org/10.1117/12.934326

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available