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29 March 1983 Applications Of Acoustic Microscopy In The Semiconductor Industry
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Proceedings Volume 0368, Microscopy: Techniques and Capabilities; (1983)
Event: Microscopy-Techniques and Capabilities, 1982, London, United Kingdom
The Quate scanning acoustic microscope has now become established in university research groups, and interest is being shown from industry. The author has constructed a 1 GHz reflection instrument with lateral resolution better than 2 μm, and has been evaluating a number of possible applications. Some of these are discussed in detail and will include: (i) The examination of integrated circuit chips processed in MOS technologies, using the subsurface capability of the instrument. (ii) Metallurgical studies (iii) Thin-film studies, including organic thin films Emphasis will be placed on the merits of acoustic microscopy as opposed to other methods, and further developments of the technique likely to be of use will be discussed.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. J. Miller "Applications Of Acoustic Microscopy In The Semiconductor Industry", Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983);

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