Scanning Electron Acoustic Microscopy

G. Davies; A. Howie; L. Staveley-Smith

doi:10.1117/12.934327

29 March 1983 Scanning Electron Acoustic Microscopy

G. Davies, A. Howie, L. Staveley-Smith

Proceedings Volume 0368, Microscopy: Techniques and Capabilities; (1983) https://doi.org/10.1117/12.934327
Event: Microscopy-Techniques and Capabilities, 1982, London, United Kingdom

Abstract

The principles and basic imaging theory of electron acoustic microscopy are outlined and illustrated with images of semiconductor devices. Image contrast arises from local variations in stopping power and thermal properties of the specimen but variations in elastic properties are also important. In elastically anisotropic materials the contrast depends on crystallographic grain orientation. Examples of such grain contrast are discussed as well as of grain boundary contrast which is interesting but less well understood.

Citation Download Citation

G. Davies, A. Howie, and L. Staveley-Smith "Scanning Electron Acoustic Microscopy", Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); https://doi.org/10.1117/12.934327

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