16 June 1983 Rigorous Diffraction Theory Applied To Video Disk Geometries
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Proceedings Volume 0369, Max Born Centenary Conf; (1983) https://doi.org/10.1117/12.934441
Event: The Max Born Centenary Conference, 1982, Edinburgh, United Kingdom
This paper briefly describes the principles of the recording and read-out of optical video discs, and presents a method to inspect pit geometries. The pit structure on the disc containing the video information is considered to act as a biaxial grating. It is shown that when continuous grooves are recorded on a disc, diffraction experiments give the dimensions of these grooves by comparing them to results of rigorous theory of diffraction by a finitely conducting uniaxial periodic structure with polygonal height profile. This measuring technique yields a precision of 3 nm in depth, 25 nm in width and 3° in slope.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. H.T. Pasman, J. H.T. Pasman, } "Rigorous Diffraction Theory Applied To Video Disk Geometries", Proc. SPIE 0369, Max Born Centenary Conf, (16 June 1983); doi: 10.1117/12.934441; https://doi.org/10.1117/12.934441

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