Conduction Processes In Polysilicon: Effects Of Laser Restructuring

A. N. Khondker; R. R. Shah; D. M. Kim

doi:10.1117/12.934953

9 August 1983 Conduction Processes In Polysilicon: Effects Of Laser Restructuring

A. N. Khondker, R. R. Shah, D. M. Kim

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934953
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

3-D integration of semiconductor devices will ultimately be realized via the use of laser or electron beam processed polysilicon. Although it is desirable to generate single crystal regions from polycrystalline silicon deposited in appropriate locations on a device structure during the course of device fabrication, that may not always be feasible for various reasons. It is, therefore, absolutely imperative to understand the performance of devices fabricated in either very large grain polysilicon or in near single crystal material containing defects and grain boundaries. In order to model devices fabricated in polysilicon with arbitrary grain size and trap density distribution, we have developed a conceptually novel approach to describe conduction in polysilicon. This methodology has been used to investigate the effects of laser restructuring of polysilicon.

Citation Download Citation

A. N. Khondker, R. R. Shah, and D. M. Kim "Conduction Processes In Polysilicon: Effects Of Laser Restructuring", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934953

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available