Laser Redundancy: Past, Present, And Future

Edward J. Swenson

doi:10.1117/12.934960

9 August 1983 Laser Redundancy: Past, Present, And Future

Edward J. Swenson

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934960
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

The evolution of laser implemented redundancy, or simply "laser redundancy", as a production process used to improve semiconductor manufacturing yields, is described. Increasingly demanding process requirements and associated implications for laser equipment are identified. Finally, laser redundancy appears to be just the first of many applications where the laser will be used to modify semiconductor circuits.

Citation Download Citation

Edward J. Swenson "Laser Redundancy: Past, Present, And Future", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934960

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available