9 August 1983 Laser Redundancy: Past, Present, And Future
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Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934960
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States
Abstract
The evolution of laser implemented redundancy, or simply "laser redundancy", as a production process used to improve semiconductor manufacturing yields, is described. Increasingly demanding process requirements and associated implications for laser equipment are identified. Finally, laser redundancy appears to be just the first of many applications where the laser will be used to modify semiconductor circuits.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward J. Swenson, Edward J. Swenson, } "Laser Redundancy: Past, Present, And Future", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934960; https://doi.org/10.1117/12.934960
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