9 August 1983 Some New Laser Processing Applications In Microelectronics
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Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934942
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States
Abstract
Currently widespread commercial applications of laser processing in the microelectronics industry is limited to resistor trimming by micromachining, link blowing for the repair of very large memory circuits, mask repair, and wafer labeling. This paper describes several potential applications for laser processing which are being investigated at Texas A&M. The areas are given below with a brief summary of the results.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald L. Parker, Donald L. Parker, } "Some New Laser Processing Applications In Microelectronics", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); doi: 10.1117/12.934942; https://doi.org/10.1117/12.934942
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