8 November 1983 Layer Generation For Devices And Integrated Circuits
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Proceedings Volume 0387, Technology of Stratified Media; (1983) https://doi.org/10.1117/12.934976
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States
Abstract
Solid-state electronics is based on devices constructed from sequentially deposited layers of semiconductors, metals and insulators. This paper discusses some of the performance limiting parameters of such structures with particular attention being given to their surface and interfacial properties.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Derek L. Lile, Derek L. Lile, } "Layer Generation For Devices And Integrated Circuits", Proc. SPIE 0387, Technology of Stratified Media, (8 November 1983); doi: 10.1117/12.934976; https://doi.org/10.1117/12.934976
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