7 November 1983 Overlay Performance Of The Perkin-Elmer Model 500
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We describe the procedures and results of overlay performance evaluation conducted on production Micralign Series Model 500s. Studies of machine-to-contact print and machine-to-machine overlay, stability, and automatic alignment are presented. Preliminary results on automatic alignment indicate that the 98% limit of total overlay error - alignment plus distortion - can be kept below 0.3 μm.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. P. Ausschnitt, C. P. Ausschnitt, T. A. Brunner, T. A. Brunner, D. J. Cronin, D. J. Cronin, } "Overlay Performance Of The Perkin-Elmer Model 500", Proc. SPIE 0394, Optical Microlithography II: Technology for the 1980s, (7 November 1983); doi: 10.1117/12.935123; https://doi.org/10.1117/12.935123

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