A Meander Channel CCD Infrared Imager With A Platinum Silicide Schottky Barrier

Yuichiro Ito; Akira Shimohashi; Toshiro Yamamoto; Kunihiro Tanikawa

doi:10.1117/12.935181

30 November 1983 A Meander Channel CCD Infrared Imager With A Platinum Silicide Schottky Barrier

Yuichiro Ito, Akira Shimohashi, Toshiro Yamamoto, Kunihiro Tanikawa

Proceedings Volume 0395, Advanced Infrared Sensor Technology; (1983) https://doi.org/10.1117/12.935181
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

This paper describes a new configuration for a Schottky barrier IRCCD (SB-IRCCD). This device utilizes a Meander Channel CCD (MCCD) for both the vertical and horizontal readout registers. The MCCD has simple electrode configuration consisting of two straight gate electrodes over the meander channel without bus lines and contact holes. This simple electrode configuration increases the fill factor of SB-IRCCD and results in the improvement of its photoresponse. In addition, the versatile electrode configuration of the MCCD simplifies connection (in corner turns) between the vertical and horizontal readout registers. A 64 x 64-element monolithic Schottky barrier infrared meander channel CCD (SB-IRMCCD) with a 23 % fill factor was fabricated with a relaxed 10 μm design rule. This paper also discuss how a fill factor of 57 % will be possible by decreasing the area of the vertical MCCD register to 30 % of the present device.

Citation Download Citation

Yuichiro Ito, Akira Shimohashi, Toshiro Yamamoto, and Kunihiro Tanikawa "A Meander Channel CCD Infrared Imager With A Platinum Silicide Schottky Barrier", Proc. SPIE 0395, Advanced Infrared Sensor Technology, (30 November 1983); https://doi.org/10.1117/12.935181

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KEYWORDS

Charge-coupled devices

Electrodes

Thermography

Infrared radiation

Sensors

Platinum

Diodes

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