Advances In Submicron Positioning

Karl Spanner; Harry Marth

doi:10.1117/12.935225

26 October 1983 Advances In Submicron Positioning

Karl Spanner, Harry Marth

Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935225
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Piezoelectric Translators convert the electrical energy directly to a mechanical movement. That is the reason why piezoelectric translators have a lot of advantages if used as positioners in applications with demands of high accuracy and resolution. Possibilities and realization of new developed and optimized piezo translators for long expansion or high forces have been taken into consideration.

Citation Download Citation

Karl Spanner and Harry Marth "Advances In Submicron Positioning", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); https://doi.org/10.1117/12.935225

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