Advances In Submicron Positioning

Karl Spanner; Harry Marth

doi:10.1117/12.935225

26 October 1983 Advances In Submicron Positioning

Karl Spanner, Harry Marth

Author Affiliations +

Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935225
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Piezoelectric Translators convert the electrical energy directly to a mechanical movement. That is the reason why piezoelectric translators have a lot of advantages if used as positioners in applications with demands of high accuracy and resolution. Possibilities and realization of new developed and optimized piezo translators for long expansion or high forces have been taken into consideration.

Citation Download Citation

Karl Spanner and Harry Marth "Advances In Submicron Positioning", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); https://doi.org/10.1117/12.935225

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE