Laser Pattern Generation System

Hideo Tsuiki; Seiichi Ito

doi:10.1117/12.935263

26 October 1983 Laser Pattern Generation System

Hideo Tsuiki, Seiichi Ito

Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935263
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

A raster scanning laser pattern generation system for imaging printed circuit board (PCB) master artwork has been developed. The system can generate a master artwork image up to 600 mm (fast scanning direction) by 650 mm (slow scanning direction) in size at a 370 cm2/min. imaging speed, guaranteeing ±20 pm feature location accuracy in the whole imaging area. Introduction of this system to the master artwork imaging process is expected to result in a dramatic effect realizing an imaging time reduction by a factor of ten on the average and by a factor of more than thirty on large scale and high circuit density master artwork, even when time for data handling is taken into account.

Citation Download Citation

Hideo Tsuiki and Seiichi Ito "Laser Pattern Generation System", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); https://doi.org/10.1117/12.935263

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