26 October 1983 Laser Pattern Generation System
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Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935263
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
A raster scanning laser pattern generation system for imaging printed circuit board (PCB) master artwork has been developed. The system can generate a master artwork image up to 600 mm (fast scanning direction) by 650 mm (slow scanning direction) in size at a 370 cm2/min. imaging speed, guaranteeing ±20 pm feature location accuracy in the whole imaging area. Introduction of this system to the master artwork imaging process is expected to result in a dramatic effect realizing an imaging time reduction by a factor of ten on the average and by a factor of more than thirty on large scale and high circuit density master artwork, even when time for data handling is taken into account.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideo Tsuiki, Hideo Tsuiki, Seiichi Ito, Seiichi Ito, } "Laser Pattern Generation System", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935263; https://doi.org/10.1117/12.935263
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