Precision galvanometers and multifaceted polygons are produced in prototype and production quantities by the thin film epoxy replication process. These mirrors are useable over the full spectral region from ultra-violet to the visible to the long infra red. Flatness to 1/10 wave and angular accuracies to 2 arc sec are practical. Substrate materials include aluminum for minimum cost and beryllium for minimum inertia. Test results on both galvanometers and prismatic scanners are presented.