26 October 1983 Rotating Scan Interferometer
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Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935258
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
Centration, tilt and offset of spheric and of aspheric surfaces are detected by an interferometer with a zonal rotary scan by means of a precise air bearing spindle thus providing the topography of the sample.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Langenbeck, "Rotating Scan Interferometer", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935258; https://doi.org/10.1117/12.935258
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