26 October 1983 Rotating Scan Interferometer
Author Affiliations +
Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935258
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Centration, tilt and offset of spheric and of aspheric surfaces are detected by an interferometer with a zonal rotary scan by means of a precise air bearing spindle thus providing the topography of the sample.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Langenbeck, Peter Langenbeck, } "Rotating Scan Interferometer", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935258; https://doi.org/10.1117/12.935258

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