The Fabrication Of Fine Lens Arrays By Laser Beam Writing

Michael T. Gale; Karl Knop

doi:10.1117/12.935397

26 October 1983 The Fabrication Of Fine Lens Arrays By Laser Beam Writing

Michael T. Gale, Karl Knop

Proceedings Volume 0398, Industrial Applications of Laser Technology; (1983) https://doi.org/10.1117/12.935397
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Lenticular arrays with near diffraction-limited performance have been generated by laser beam writing. A photoresist film is exposed in a line raster mode by scanning under an intensity-modulated focused laser beam; subsequent development of the resist film produces the desired lenticular relief profile. The writing of exposure patterns by raster scanning is analyzed, and it is shown that very precise positioning of each raster line is required to avoid unwanted modulation terms. A low cost xy positioning table with better than 20 nm dynamic positioning accuracy was constructed to satisfy this requirement, and has been used to generate high quality fine lenticular arrays with lenslets of widths down to 20 μm and relief depths up to about 4 μm.

Citation Download Citation

Michael T. Gale and Karl Knop "The Fabrication Of Fine Lens Arrays By Laser Beam Writing", Proc. SPIE 0398, Industrial Applications of Laser Technology, (26 October 1983); https://doi.org/10.1117/12.935397

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available