28 November 1983 Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering
Author Affiliations +
Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935531
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland
Abstract
Visibly transparent highly conducting indium oxide has been prepared on flexible plastic sheet in a continuous roll-to-roll reactive magnetron sputtering apparatus.Results are presented which show the sensitive dependence of the optical and electrical properties of the coatings on the deposition conditions. Attention is drawn to the control of gas admittance and maanetron current and the necessary procedures are described.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin I. Ridge, Martin I. Ridge, Ronald P. Howson, Ronald P. Howson, Inarid Ten Have, Inarid Ten Have, } "Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935531; https://doi.org/10.1117/12.935531
PROCEEDINGS
6 PAGES


SHARE
Back to Top