Fabrication Of Graded Index SiO[sub]2[/sub] Planar Optical Waveguides On Silicon Exhibiting Low Scattering

Howard E. Jackson; David E. Zelmon; J. T. Boyd; P. B. Kosel

doi:10.1117/12.935703

30 November 1983 Fabrication Of Graded Index SiO₂ Planar Optical Waveguides On Silicon Exhibiting Low Scattering

Howard E. Jackson, David E. Zelmon, J. T. Boyd, P. B. Kosel

Proceedings Volume 0408, Integrated Optics III; (1983) https://doi.org/10.1117/12.935703
Event: 1983 Technical Symposium East, 1983, Arlington, United States

Abstract

Planar graded index Si02 optical waveguides characterized by very low scattering have been fabricated on silicon substrates. The waveguides were thermally grown on silicon in two different ways. In one case, a Si02 thickness of 15 microns resulted in waveguiding with a total waveguide attenuation of 0.6 dB/cm. In another case, intentional doping of the Si02 layer allowed waveguiding to take place at a thickness of 6.6 microns with a total waveguide attenuation of 2.3 dB/cm. In each case, the relatively small magnitude of the refractive index change suggests that coupling to the silicon substrate is an important loss mechanism. Measurements imply that scattering loss from the waveguide itself is exceedingly low, and that continuing efforts to increase the field confinement may result in waveguides characterized by a substantially smaller value for the total waveguide attenuation.

Citation Download Citation

Howard E. Jackson, David E. Zelmon, J. T. Boyd, and P. B. Kosel "Fabrication Of Graded Index SiO₂ Planar Optical Waveguides On Silicon Exhibiting Low Scattering", Proc. SPIE 0408, Integrated Optics III, (30 November 1983); https://doi.org/10.1117/12.935703

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available