4 November 1983 Applications Of The Raman Microprobe In Semiconductor Device Manufacturing
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Abstract
The Raman microprobe "MOLE" (Instruments SA, Metuchen, NJ) allows one to obtain a Raman spectrum from a particle as small as one micron in diameter. The technique depends on the spectral analysis of light scattered from a monochromatically (laser) illuminated sample under a microscope; no vacuum is required, and in-situ analysis is usually possible, with minimal sample preparation. The Raman spectrum obtained from the sample, which may be organic or inorganic, gives molecular information which is useful for identification or quantitative analysis. A brief description of the method will be given, with advantages and disadvantages. Applications to various problems of semiconductor device manufacturing including contamination control, corrosion, silicon morphology, and packaging, will also be presented.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles D. Needham, "Applications Of The Raman Microprobe In Semiconductor Device Manufacturing", Proc. SPIE 0411, Electro-Optical Instrumentation for Industrial Applications, (4 November 1983); doi: 10.1117/12.935772; https://doi.org/10.1117/12.935772
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