15 November 1983 High Precision Angle Measurements Off Small Surfaces
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A method is described for measuring the orientation of small plane surfaces several tens of micrometers on a side with a resolution of several seconds of arc. A laser beam waist is located on the test surface which underfills the surface. The reflected beam is detected by a quadrant detector to determine the offset of the beam from its nominal position. This displacement determines the relative angular difference from a predetermined angular standard. Advantages of this method for precise angle determination are the ability to measure small surfaces, insensitivity to translations of the test piece, large test piece clearance for inaccessible surfaces, and compensation for laser drift.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Russell A. Chipman, "High Precision Angle Measurements Off Small Surfaces", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936353; https://doi.org/10.1117/12.936353


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