15 November 1983 Instantaneous Phase Measuring Interferometry
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Abstract
Conventional phase measuring interferometry normally requires one-half to sixty seconds acquisition time, limiting measurement to stationary phenomenon such as optical element wavefronts. We have developed an instantaneous PMI that measures displacements at one point to a resolution of 0.003 microns. We will describe this instrument and an interferometer measuring phase to lambda/2000 with a measurement aperture of less than one microsec. Also described is an attached system for analysing and displaying wavefronts at up to 10 Hz.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Smythe, R. Moore, "Instantaneous Phase Measuring Interferometry", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936335; https://doi.org/10.1117/12.936335
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