15 November 1983 Instantaneous Phase Measuring Interferometry
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Abstract
Conventional phase measuring interferometry normally requires one-half to sixty seconds acquisition time, limiting measurement to stationary phenomenon such as optical element wavefronts. We have developed an instantaneous PMI that measures displacements at one point to a resolution of 0.003 microns. We will describe this instrument and an interferometer measuring phase to lambda/2000 with a measurement aperture of less than one microsec. Also described is an attached system for analysing and displaying wavefronts at up to 10 Hz.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Smythe, R. Smythe, R. Moore, R. Moore, } "Instantaneous Phase Measuring Interferometry", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936335; https://doi.org/10.1117/12.936335
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