15 November 1983 Interferometric Phase Measurement Using Spatial Synchronous Detection
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Abstract
A family of three phase measurement techniques are described that are spatial analogs of the popular temporal phase-shift methods. For these spatial techniques, the need for an active element such as a piezoelectric translator or an electro-optic crystal is eliminated simply by adding tilt to the fringe pattern. Measurements are obtained over a uniform grid with an accuracy comparable to temporal phase-shift interferometry. Advantages and disadvantages are discussed.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth H. Womack, Kenneth H. Womack, "Interferometric Phase Measurement Using Spatial Synchronous Detection", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936334; https://doi.org/10.1117/12.936334
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