15 November 1983 The Precision Measurement And Characterization Of Surface Finish
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Proceedings Volume 0429, Precision Surface Metrology; (1983); doi: 10.1117/12.936344
Event: 27th Annual Technical Symposium, 1983, San Diego, United States
Abstract
This paper presents a rationale for the precision measurement and characterization of surface finish using Fourier techniques. It offers a precise definition of figure and finish errors in the frequency domain and discusses particular finish statistics of importance for optical surfaces: the finish power spectral density and the mean-square finish error. Problems involved in estimating these quantities from practical measurements are discussed and illustrated. The need for an expanded data base of spectral shapes is emphasized.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. L. Church, "The Precision Measurement And Characterization Of Surface Finish", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936344; https://doi.org/10.1117/12.936344
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KEYWORDS
Surface finishing

Error analysis

Mirrors

Diffraction

Image quality

Precision measurement

Statistical analysis

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