26 October 1983 Developments In Fabrication Of Binary Optical Elements
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We have produced highly efficient binary diffraction gratings -- 94% first order diffraction efficiency measured in the infrared (10.6 μm) on straight binary gratings and on binary holographic off-axis lenses. The observed point-spread functions of these lenses (F/10, f = 25 cm) were limited only by diffraction. To fabricate gratings we adapted IC production techniques. Our work brings together three independent developments: (1) theories on binary diffraction gratings operating in the EM domain, (2) large-scale integration (LSI) advances in pattern generation and substrate depositions, and (3) improvements in reactive ion-beam etching techniques.
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Wilfrid B. Veldkamp, Gary J. Swanson, "Developments In Fabrication Of Binary Optical Elements", Proc. SPIE 0437, Intl Conf on Computer-Generated Holography, (26 October 1983); doi: 10.1117/12.937130; https://doi.org/10.1117/12.937130

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