26 October 1983 Developments In Fabrication Of Binary Optical Elements
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Abstract
We have produced highly efficient binary diffraction gratings -- 94% first order diffraction efficiency measured in the infrared (10.6 μm) on straight binary gratings and on binary holographic off-axis lenses. The observed point-spread functions of these lenses (F/10, f = 25 cm) were limited only by diffraction. To fabricate gratings we adapted IC production techniques. Our work brings together three independent developments: (1) theories on binary diffraction gratings operating in the EM domain, (2) large-scale integration (LSI) advances in pattern generation and substrate depositions, and (3) improvements in reactive ion-beam etching techniques.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wilfrid B. Veldkamp, Gary J. Swanson, "Developments In Fabrication Of Binary Optical Elements", Proc. SPIE 0437, Intl Conf on Computer-Generated Holography, (26 October 1983); doi: 10.1117/12.937130; https://doi.org/10.1117/12.937130
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