26 November 1983 Trace Analysis Of Moisture In Integrated Circuit Packages Using Derivative Diode Laser Spectrometry
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Abstract
Derivative infrared diode laser spectrometry has been used for the rapid and precise (± 50 ppmν) determination of trace (> 50 ppmy) moisture in small (10-100 μL) samples of gas as they expand into an evacuated absorption cell. Adsorption/desorption of the analyte is the most serious potential source of error in the measurement; however, the application of time-resolved (resolution < 10 msec) techniques permits accurate analyses in the presence of these dynamic processes. The experimental method and a simple model which accurately reproduces the concentration-time behavior observed during analysis are presented which permits the analyst to ensure the accuracy of any given measurement or detect and correct erroneous ones. The method has been applied to the determination of moisture in hermetically sealed integrated circuit (IC) packages and is shown to be a superior alternative to existing methods using mass spectrometry (MIL-STD Method 1018.2).
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. A. Mucha, "Trace Analysis Of Moisture In Integrated Circuit Packages Using Derivative Diode Laser Spectrometry", Proc. SPIE 0438, Tunable Diode Laser Development and Spectroscopy Applications, (26 November 1983); doi: 10.1117/12.937428; https://doi.org/10.1117/12.937428
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KEYWORDS
Statistical analysis

Spectroscopy

Adsorption

Semiconductor lasers

Calibration

Laser spectroscopy

Error analysis

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