9 January 1984 Servo-Control Of Fabry-Perot Interferometers I-Technique
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We describe here the application of capacitance micrometry to the control of piezo scanned Fabry-Perot etalons using a closed loop feedback system. This system removes the problem of the non-linear response and hysteresis associated with piezo-electric transducers and allows precise control of both etalon gap and parallelism.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N K Reay, N K Reay, T R Hicks, T R Hicks, P D Atherton, P D Atherton, } "Servo-Control Of Fabry-Perot Interferometers I-Technique", Proc. SPIE 0445, Instrumentation in Astronomy V, (9 January 1984); doi: 10.1117/12.966119; https://doi.org/10.1117/12.966119

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