PROCEEDINGS VOLUME 0448
27TH ANNUAL TECHNICAL SYMPOSIUM | 23-25 AUGUST 1983
X-Ray Lithography and Applications of Soft X-Rays to Technology
Editor(s): Alan D. Wilson
IN THIS VOLUME

1 Sessions, 16 Papers, 0 Presentations
All Papers  (16)
27TH ANNUAL TECHNICAL SYMPOSIUM
23-25 August 1983
San Diego, United States
All Papers
Proc. SPIE 0448, Progress In High Peak And Average Power Lasers For Soft X-Ray Production, 0000 (19 March 1984); doi: 10.1117/12.939201
Proc. SPIE 0448, Comparison Of Different X-Ray Sources: X-Ray Tubes, Laser Induced Plasma Sources, Compact And Conventional Storage Rings, 0000 (19 March 1984); doi: 10.1117/12.939202
Proc. SPIE 0448, Characteristics And Uses Of X-Radiation From Laser-Heated Plasmas, 0000 (19 March 1984); doi: 10.1117/12.939203
Proc. SPIE 0448, Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates, 0000 (19 March 1984); doi: 10.1117/12.939204
Proc. SPIE 0448, Zone Plate Designs For The Soft X-Ray Range, 0000 (19 March 1984); doi: 10.1117/12.939205
Proc. SPIE 0448, Synchrotron Radiation X-Ray Lithography: Recent Results, 0000 (19 March 1984); doi: 10.1117/12.939206
Proc. SPIE 0448, X-Ray Lithography Station At The Stanford Synchrotron Radiation Laboratory (SSRL), 0000 (19 March 1984); doi: 10.1117/12.939207
Proc. SPIE 0448, X-Ray Lithography Using Wiggler And Undulator Synchrotron Radiation Sources, 0000 (19 March 1984); doi: 10.1117/12.939208
Proc. SPIE 0448, Storage Ring Design For X-Ray Lithography, 0000 (19 March 1984); doi: 10.1117/12.939209
Proc. SPIE 0448, Possibility Of Enlarging X-Ray Exposure Area With X-Ray Mirror Or By Electron Beam Vertical Motion, 0000 (19 March 1984); doi: 10.1117/12.939210
Proc. SPIE 0448, Optimization Of The Optics Matching A Storage Ring To An X-Ray Lithography Camera, 0000 (19 March 1984); doi: 10.1117/12.939211
Proc. SPIE 0448, An X-Ray Stepper, 0000 (19 March 1984); doi: 10.1117/12.939212
Proc. SPIE 0448, X-Ray Lithography Alignment System, 0000 (19 March 1984); doi: 10.1117/12.939213
Proc. SPIE 0448, B-Si masks for storage ring X-ray lithography, 0000 (19 March 1984); doi: 10.1117/12.939214
Proc. SPIE 0448, Resists For Storage Ring X-Ray Lithography, 0000 (19 March 1984); doi: 10.1117/12.939215
Proc. SPIE 0448, Electron Beam Pattern Writer For X-Ray Masks, 0000 (19 March 1984); doi: 10.1117/12.939216
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