19 March 1984 Comparison Of Different X-Ray Sources: X-Ray Tubes, Laser Induced Plasma Sources, Compact And Conventional Storage Rings
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Abstract
This paper presents a survey of the lithography-relevant properties of various x-ray sources, such as x-ray tubes, storage rings, and plasma sources. Based on this, the projects which have been started within the Berlin lithography group are summarized briefly. The main activities are concentrated on the development of a low-cost compact storage ring, designa-ted "COSY", which is an ironless monolithic storage ring with superconducting coils, with a critical wavelength of 12 A, and a current of several 100 mA. The first prototype construc-ted at BESSY will be ready for tests at the end of 1985. In addition, initial experiments concerning a laser-induced plasma source, carried out together with PTB, are described briefly.
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A Heuberger, A Heuberger, } "Comparison Of Different X-Ray Sources: X-Ray Tubes, Laser Induced Plasma Sources, Compact And Conventional Storage Rings", Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); doi: 10.1117/12.939202; https://doi.org/10.1117/12.939202
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