19 March 1984 Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates
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Abstract
Free-standing transmission gratings and zone plates which are to be used as dispersion elements for x rays have been fabricated with UV holography and x-ray lithography.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y Vladimirsky, E Kallne, and Eberhard Spiller "Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates", Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); doi: 10.1117/12.939204; https://doi.org/10.1117/12.939204
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