15 August 1984 Silicon Multifiber Connector And Multifiber Splicing - Two Possibilities For Quick And Simple Connection Of A Large Number Of Fibers
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Proceedings Volume 0468, Fibre Optics '84; (1984) https://doi.org/10.1117/12.941636
Event: Sira/Fibre Optics '84, 1984, London, United Kingdom
Abstract
The precision made parts of the multifiber connectors are made of silicon. Silicon is a material which has become very important in the last decades. It is particulary well known in semi-conductor technology, in which a great number of microelectronic components are produced from silicon. However not only microelectronic components may be made from silicon, but also the most minute mechanical components. The basic material of the Silicon-Multifiber-Connector (S.M.C.) is single crystal silicon in wafer form. These discs are 0.5 mm thick and are coated with an oxide layer onto which a photoresist has been deposited. Through a photomask, on which all the patterns of the S.M.C. are mapped, the photoresist is exposed to ultraviolet radiation. Thereby a chemical reaction takes place, resulting in the unexposed areas, necessary for producing the precision etching mask from the oxide layer. The wafers for the S.M.C. are <100> oriented. If this silicon is treated with an anisotropic etchant (e.g. KOH, NaOH), then due to an opening in the oxide layer, a corresponding V-shaped depression is created.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rudolf Sammueller, Rudolf Sammueller, } "Silicon Multifiber Connector And Multifiber Splicing - Two Possibilities For Quick And Simple Connection Of A Large Number Of Fibers", Proc. SPIE 0468, Fibre Optics '84, (15 August 1984); doi: 10.1117/12.941636; https://doi.org/10.1117/12.941636
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