Translator Disclaimer
29 June 1984 An Analysis Of Pellicle Parameters For Step-And-Repeat Projection
Author Affiliations +
Abstract
Pellicles are thin transparent membranes of high optical quality that are placed on one or both sides of an IC circuit mask to protect the mask and to prevent any particulate defect falling onto the mask from affecting the printed image [1]. Pellicles have been successfully utilized in production with 1:1 scanning systems and have given measureable improvements in yield [2].
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alex Flamholz "An Analysis Of Pellicle Parameters For Step-And-Repeat Projection", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941903
PROCEEDINGS
9 PAGES


SHARE
Advertisement
Advertisement
Back to Top