29 June 1984 Applications Of The Square Count Yield Model
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Abstract
Yield data presented both for meander tracks and for contact chains show that the latter are considerably more vulnerable to defects involved in wafer processing, especially at the smaller feature sizes. A yield model, which is extended to cater for this difference, is applied to aspects of the scaling of integrated circuits.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A Marsh, A Marsh, } "Applications Of The Square Count Yield Model", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); doi: 10.1117/12.941886; https://doi.org/10.1117/12.941886
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