29 June 1984 VHSIC - A Test Bed For Advanced Lithography
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Abstract
The VHSIC program is, by now, quite well known to many of you. I would like, however, to take a few minutes to review both the origins and the current status of the VHSIC program and particularly those areas which relate to high resolution, high throughput lithography for submicron silicon integrated circuits.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Egbert D Maynard, "VHSIC - A Test Bed For Advanced Lithography", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); doi: 10.1117/12.941876; https://doi.org/10.1117/12.941876
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KEYWORDS
Lithography

Optical lithography

Semiconducting wafers

Electron beam lithography

X-rays

Prototyping

Manufacturing

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