18 January 1985 High Accuracy Phase Measurement In Real Time
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Proceedings Volume 0473, Symposium Optika '84; (1985) https://doi.org/10.1117/12.942412
Event: Symposium Optika '84, 1984, Budapest, Hungary
Abstract
Real time interferometry using the intensities at discrete reference phase values equally distributed over one fringe period is described. Principle, experimental setup and test examples (plane and spherical surfaces, optical systems) are discussed. Further, some error causes are covered, compensation techniques described and experimentally proofed
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johannes Schwider, Johannes Schwider, Regina Burow, Regina Burow, Karl-Edmund Elssner, Karl-Edmund Elssner, Jurgen Grzanna, Jurgen Grzanna, Reiner Spolaczyk, Reiner Spolaczyk, } "High Accuracy Phase Measurement In Real Time", Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); doi: 10.1117/12.942412; https://doi.org/10.1117/12.942412
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