Experimental results of detailed measurements of periodic surface damage induced by pulses from a Nd:YAG laser radiation on surface of Ge samples and Ge films on Si02 substrate are reported. The periodic surface structures or ripples are created by the intensity modulation on the surface which is the result of the interference of incident laser beam and a coherently scattered surface waves (surface plasmons, grazing transversal waves, surface polaritons), which may be generated by photons at a rough surface. We consider a dependence of ripples growth rate from direction of incident light polarization, form of the laser spot, direction of surface wave travelling. The coherent extension of ripples from overlapping laser spots was observed for the grating with spasing d=λ/cosθ where θ is angle of incidence of laser beam, λ is wavelength of light. The optical grating with square near 2 cm2 was manufactured.